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Scanning Probe Lithography formatIsbn:Hardcover - 9780792373612 Mobbing-AttackenScanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer scale features on the sample. SPL is capable of patterning sub 30nm features with nanometer scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer scale features on various